Ge and III/V devices on Si for advanced CMOS

Heyns, MarcMarcHeynsBellenger, FlorenceFlorenceBellengerBrammertz, GuyGuyBrammertzCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtDe Jaeger, BriceBriceDe JaegerDelabie, AnneliesAnneliesDelabieEneman, GeertGeertEnemanGroeseneken, GuidoGuidoGroesenekenHoussa, MichelMichelHoussaLeonelli, DanieleDanieleLeonelliLin, DennisDennisLinMerckling, ClementClementMercklingMeuris, MarcMarcMeurisMitard, JeromeJeromeMitardPenaud, JulienJulienPenaudPourtois, GeoffreyGeoffreyPourtoisRooyackers, RitaRitaRooyackersScarrozza, MarcoMarcoScarrozzaSimoen, EddyEddySimoenVan Elshocht, SvenSvenVan ElshochtVandenberghe, WilliamWilliamVandenbergheVandooren, AnneAnneVandoorenVerhulst, AnneAnneVerhulst2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15474Ge and III/V devices on Si for advanced CMOSMeeting abstract