Conformal doping of FINFET's: a fabrication and metrology challenge

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenMody, JayJayModyJurczak, GosiaGosiaJurczakNguyen, DuyDuyNguyenTakeuchi, ShotaroShotaroTakeuchiLeys, FrederikFrederikLeysLoo, RogerRogerLooCaymax, MattyMattyCaymaxEveraert, Jean-LucJean-LucEveraert2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14705Conformal doping of FINFET's: a fabrication and metrology challengeMeeting abstract