Barkusky, FrankFrankBarkuskyPeth, ChristianChristianPethBayer, ArminArminBayerMann, KlausKlausMannJohn, JoachimJoachimJohnMalinowski, PawelPawelMalinowski2021-10-172021-10-1720090034-6748https://imec-publications.be/handle/20.500.12860/14950Radiation damage resistance of AlGaN detectors for applications in the extreme-ultraviolet spectral rangeJournal articlehttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=RSINAK000080000009093102000001&idtype=cvips&gifs=yes