High precision micro-scale Hall effect characterization method using in-line micro four-point probes

Petersen, DirchDirchPetersenHansen, OleOleHansenLin, RongRongLinNielsen, P.F.P.F.NielsenClarysse, TrudoTrudoClarysseGoossens, JozefienJozefienGoossensRosseel, ErikErikRosseelVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14309High precision micro-scale Hall effect characterization method using in-line micro four-point probesProceedings paper