Measurement of residual stress in thin films by using the optical microprobe

Atkinson, A.A.AtkinsonClarke, D. R.D. R.ClarkeJain, SureshSureshJainPinardi, KuntjoroKuntjoroPinardiWebb, S.S.Webb2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2347Measurement of residual stress in thin films by using the optical microprobeProceedings paper