A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes

Zahedmanesh, HoumanHoumanZahedmaneshVanstreels, KrisKrisVanstreelsGonzalez, MarioMarioGonzalez2021-10-232021-10-2320160167-9317https://imec-publications.be/handle/20.500.12860/27649A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probesJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931716300065