Hikavyy, AndriyAndriyHikavyyKruv, AnastaiiaAnastaiiaKruvVan Opstal, TinnekeTinnekeVan OpstalPorret, ClémentClémentPorretLoo, RogerRogerLoo2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28513Investigation of Cl2 etch in view of extremely low temperature selective epitaxial processesProceedings paper