Su, JialeJialeSuLeonov, VladimirVladimirLeonovGoedbloed, MartijnMartijnGoedbloedvan Andel, YvonneYvonnevan Andelde Nooijer, ChristineChristinede NooijerElfrink, ReneReneElfrinkWang, ZiyangZiyangWangVullers, RuudRuudVullers2021-10-182021-10-182010-100960-1317https://imec-publications.be/handle/20.500.12860/18048A batch process micromachined thermoelectric energy harvester: fabrication and characterizationJournal article10.1088/0960-1317/20/10/104005