Wang, GangGangWangNguyen, DuyDuyNguyenLeys, MaartenMaartenLeysLoo, RogerRogerLooRichard, OlivierOlivierRichardBrammertz, GuyGuyBrammertzMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsCaymax, MattyMattyCaymax2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18332Selective epitaxial growth of InP in STI trenches on off-axis Si(001) substratesProceedings paper