Hydrogen and inert species in solid phase epitaxy

Lieten, RubenRubenLietenDegroote, StefanStefanDegrooteClemente, FrancescaFrancescaClementeLeys, MaartenMaartenLeysBorghs, GustaafGustaafBorghs2021-10-182021-10-1820100003-6951https://imec-publications.be/handle/20.500.12860/17494Hydrogen and inert species in solid phase epitaxyJournal articlehttp://link.aip.org/link/?APPLAB/96/052109/1