Electrical properties of MIS devices with high permittivity gate dielectric layers

Houssa, MichelMichelHoussaMertens, PaulPaulMertensHeyns, MarcMarcHeynsStesmans, AndreAndreStesmans2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4436Electrical properties of MIS devices with high permittivity gate dielectric layersProceedings paper