Philipsen, HaroldHaroldPhilipsenMonnens, WouterWouterMonnens2021-10-262021-10-2620180013-4686https://imec-publications.be/handle/20.500.12860/31524Immersion and electrochemical deposition of Ru on SiJournal articlehttps://doi.org/10.1016/j.electacta.2018.04.093