Large-scale production techniques for photonic nanostructures using excimer laser replication

Bogaerts, WimWimBogaertsTaillaert, DirkDirkTaillaertBaets, RoelRoelBaetsWiaux, VincentVincentWiauxBeckx, StephanStephanBeckx2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6041Large-scale production techniques for photonic nanostructures using excimer laser replicationProceedings paper