Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices

Hantschel, ThomasThomasHantschelTrenkler, ThomasThomasTrenklerVandervorst, WilfriedWilfriedVandervorstMalave, A.A.MalaveKulisch, W.W.KulischOesterschulze, E.E.OesterschulzeBuechel, D.D.Buechel2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2620Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devicesOral presentation