DyScHfO as high-k gate dielectric: structural and electrical properties

Adelmann, ChristophChristophAdelmannVan Elshocht, SvenSvenVan ElshochtLehnen, PeerPeerLehnenConard, ThierryThierryConardFranquet, AlexisAlexisFranquetZhao, ChaoChaoZhaoRagnarsson, Lars-AkeLars-AkeRagnarssonChang, Vincent S.Vincent S.ChangCho, Hag-JuHag-JuChoYu, HongYuHongYuYuDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11622DyScHfO as high-k gate dielectric: structural and electrical propertiesProceedings paperhttp://www.ecsdl.org/vsearch/servlet/VerityServlet?KEY=ECSTF8&smode=strresults&sort=rel&maxdisp=25&threshold=0&pjournals=ECSTF8&