Heavy ion implantation in Ge: dramatic radiation induced morphology in Ge

Janssens, TomTomJanssensHuyghebaert, CedricCedricHuyghebaertVanhaeren, DanielleDanielleVanhaerenWinderickx, GillisGillisWinderickxSatta, AlessandraAlessandraSattaMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10644Heavy ion implantation in Ge: dramatic radiation induced morphology in GeOral presentation