Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-) MEMS devices

Jourdain, AnneAnneJourdainDe Moor, PietPietDe MoorBaert, KrisKrisBaertDe Wolf, IngridIngridDe WolfTilmans, HarrieHarrieTilmans2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/10664Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-) MEMS devicesJournal article