Measurement and simulation of boron diffusion in strained Si1- xGex epitaxial layers

Krishnasamy, RajendranRajendranKrishnasamySchoenmaker, WimWimSchoenmakerDecoutere, StefaanStefaanDecoutereLoo, RogerRogerLooCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5602Measurement and simulation of boron diffusion in strained Si1- xGex epitaxial layersJournal article