Characterization of electrically active dopant profiles with the spreading resistance probe

Clarysse, TrudoTrudoClarysseVanhaeren, DanielleDanielleVanhaerenHoflijk, IlseIlseHoflijkVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8699Characterization of electrically active dopant profiles with the spreading resistance probeJournal article