On the asymmetric splitting of CBED HOLZ lines under the gate of recessed SiGe source/drain transistors

Benedetti, AlessandroAlessandroBenedettiBender, HugoHugoBender2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11717On the asymmetric splitting of CBED HOLZ lines under the gate of recessed SiGe source/drain transistorsProceedings paper