Morris, RichardRichardMorrisCuduvally, RamyaRamyaCuduvallyMelkonyan, DavitDavitMelkonyanFleischmann, ClaudiaClaudiaFleischmannZhao, MingMingZhaoArnoldi, LaurentLaurentArnoldivan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-2520181071-1023https://imec-publications.be/handle/20.500.12860/31374Towards accurate composition analysis of GaN and AlGaN using Atom Probe TomographyJournal articlehttps://avs.scitation.org/doi/full/10.1116/1.5019693