Feature grouping to enable edge placement error-aware process control in multi-feature logic use case

Schelcher, GuillaumeGuillaumeSchelcherAthayde, MarsilMarsilAthaydeSchoofs, StijnStijnSchoofsHsia, JeffJeffHsiaKhalik, ZuanZuanKhalikLi, FahongFahongLiNechaev, KonstantinKonstantinNechaevSahraeian, RezaRezaSahraeianTamaddon, Amir-HosseinAmir-HosseinTamaddonBlanco, VictorVictorBlancovan der Sanden, StefanStefanvan der SandenZhang, YichenYichenZhangAnunciado, RoyRoyAnunciadoDillen, HarmHarmDillenLeray, PhilippePhilippeLeray2024-08-262024-06-152024-08-262024978-1-5106-7216-10277-786XWOS:001224296200017https://imec-publications.be/handle/20.500.12860/44056Feature grouping to enable edge placement error-aware process control in multi-feature logic use caseProceedings paper10.1117/12.3010421978-1-5106-7217-8WOS:001224296200017