Miyaguchi, KenichiKenichiMiyaguchiParvais, BertrandBertrandParvaisRagnarsson, Lars-AkeLars-AkeRagnarssonWambacq, PietPietWambacqRaghavan, PraveenPraveenRaghavanMercha, AbdelkarimAbdelkarimMerchaMocuta, AndaAndaMocutaVerkest, DiederikDiederikVerkestThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25654Modeling FinFET metal gate stack resistance for 14nm node and beyondProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7165885