Brems, StevenStevenBremsHauptmann, MarcMarcHauptmannCamerotto, ElisabethElisabethCamerottoXu, XiuMeiXiuMeiXuDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsMertens, PaulPaulMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16799The influence of the angle of incidence in megasonic cleaningMeeting abstract