Trager-Cowan, C.C.Trager-CowanTreguer, J. F.J. F.TreguerGrimson, S. T. F.S. T. F.GrimsonOsborne, I.I.OsborneBarisonzi, M.M.BarisonziMiddleton, P. G.P. G.MiddletonManson-Smith, S. K.S. K.Manson-SmithMohammed, A.A.MohammedO'Donnell, K. P.K. P.O'DonnellVan der Stricht, WimWimVan der StrichtJacobs, KoenKoenJacobsMoerman, IngridIngridMoermanDemeester, PietPietDemeesterWu, Ming FangMing FangWuVantomme, AndreAndreVantomme2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3886Probing nitride thin films in 3-dimensions using a variable energy electron beamOral presentation