Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy

van Spengen, MerlijnMerlijnvan SpengenDe Wolf, IngridIngridDe WolfKnechtel, R.R.Knechtel2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4855Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopyProceedings paper