Design and characterization of a MEMS thermal actuator and a locking switch for telecommunication applications

Dellaert, DriesDriesDellaertDoutreloigne, JanJanDoutreloigne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23745Design and characterization of a MEMS thermal actuator and a locking switch for telecommunication applicationsProceedings paper