Compositional characterization of nickel silicides by HAADF-STEM imaging

Verleysen, EvelineEvelineVerleysenBender, HugoHugoBenderRichard, OlivierOlivierRichardSchryvers, DominiqueDominiqueSchryversVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18278Compositional characterization of nickel silicides by HAADF-STEM imagingOral presentation