Bennett, J.J.BennettBeebe, M.M.BeebeSparks, C.C.SparksGondran, C.C.GondranVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8565Sputter rate variations in silicon under high-k dielectric filmsJournal article