Multiple reuse of the silicon substrate in a porous silicon based layer transfer process

Hajijafarassar, AlirezaAlirezaHajijafarassarVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenSharlandziev, IvanIvanSharlandzievDepauw, ValerieValerieDepauwSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanBearda, TwanTwanBeardaDebucquoy, MaartenMaartenDebucquoyGordon, IvanIvanGordonSzlufcik, JozefJozefSzlufcikAbdulraheem, YaserYaserAbdulraheemPoortmans, JefJefPoortmansMagagnin, LucaLucaMagagnin2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26684Multiple reuse of the silicon substrate in a porous silicon based layer transfer processProceedings paper