Replacement metal contact using sacrificial ILD0 for wrap around contact in scaled FinFET technology

Chew, Soon AikSoon AikChewDemuynck, StevenStevenDemuynckZhang, LipingLipingZhangPacco, AntoineAntoinePaccoDevriendt, KatiaKatiaDevriendtTeugels, LieveLieveTeugelsHopf, TobyTobyHopfVersluijs, JankoJankoVersluijsVrancken, ChristaChristaVranckenDangol, AnishAnishDangolAltamirano Sanchez, EfrainEfrainAltamirano SanchezMocuta, DanDanMocutaHoriguchi, NaotoNaotoHoriguchi2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30409Replacement metal contact using sacrificial ILD0 for wrap around contact in scaled FinFET technologyProceedings paperhttps://ieeexplore.ieee.org/document/8430457/