Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Pathangi Sriraman, HariHariPathangi SriramanChan, BTBTChanBayana, HareenHareenBayanaVandenbroeck, NadiaNadiaVandenbroeckVan Den Heuvel, DieterDieterVan Den HeuvelVan Look, LieveLieveVan LookRincon Delgadillo, PaulinaPaulinaRincon DelgadilloCao, YiYiCaoKim, JiHoonJiHoonKimLin, GuanyangGuanyangLinParnell, DoniDoniParnellNafus, KathleenKathleenNafusHarukawa, RyotaRyotaHarukawaChikashi, ItoItoChikashiPolli, MarcoMarcoPolliD'Urzo, LuciaLuciaD'UrzoGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-222021-10-2220151932-5150https://imec-publications.be/handle/20.500.12860/25741Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flowJournal articlehttp://nanolithography.spiedigitallibrary.org/article.aspx?articleid=2389280