Garcia Bardon, MarieMarieGarcia BardonPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-182021-10-1820100018-9383https://imec-publications.be/handle/20.500.12860/17127Scaling the suspended gate FET: impact of dielectric charging and roughnessJournal article