A new high-rate deposition method for thin film crystalline Si solar cells

Sharafutdinov, R.R.SharafutdinovKhmel, S.S.KhmelSemenova, O.O.SemenovaSvitasheva, S.S.SvitashevaBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6822A new high-rate deposition method for thin film crystalline Si solar cellsProceedings paper