A silicon-based neural probe with densely-packed low-impedance titanium nitride microelectrodes for ultrahigh-resolution in vivo recordings

Fiath, RichardRichardFiathRaducanu, BogdanBogdanRaducanuMusa, SilkeSilkeMusaAndrei, AlexandruAlexandruAndreiMora Lopez, CarolinaCarolinaMora LopezVan Hoof, ChrisChrisVan HoofRuther, PatrickPatrickRutherAarts, ArnoArnoAartsHorvath, DomonkosDomonkosHorvathUlbert, IstvanIstvanUlbert2021-10-252021-10-2520180956-5663https://imec-publications.be/handle/20.500.12860/30703A silicon-based neural probe with densely-packed low-impedance titanium nitride microelectrodes for ultrahigh-resolution in vivo recordingsJournal articlehttps://www.sciencedirect.com/science/article/pii/S0956566318300708?via%3Dihub