Huang, Yan-HuaYan-HuaHuangPorret, ClémentClémentPorretHikavyy, AndriyAndriyHikavyyRengo, GianlucaGianlucaRengoPetersen Barbosa Lima, LucasLucasPetersen Barbosa LimaKhazaka, RamiRamiKhazakaKohen, DavidDavidKohenMargetis, JoeJoeMargetisTolle, JohnJohnTolleMazzamuto, FulvioFulvioMazzamutoTabata, ToshiyukiToshiyukiTabataHeyns, MarcMarcHeynsLoo, RogerRogerLoo2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33176Improving the electrical properties of epitaxial SiGe:B with excimer laser annealing treatmentsMeeting abstract