Laricchiuta, GraziaGraziaLaricchiutaVandervorst, WilfriedWilfriedVandervorstZyulkov, IvanIvanZyulkovArmini, SilviaSilviaArminiMeersschaut, JohanJohanMeersschaut2021-10-252021-10-2520180734-2101https://imec-publications.be/handle/20.500.12860/31119High sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processingJournal articlehttps://avs.scitation.org/doi/abs/10.1116/1.5016033?journalCode=jva