Etch rate study of germanium, GaAs, and InGaAs: a challenge in semiconductor processing.

Sioncke, SonjaSonjaSionckeBrunco, DavidDavidBruncoMeuris, MarcMarcMeurisVan Steenbergen, JanJanVan SteenbergenVrancken, EviEviVranckenHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14484Etch rate study of germanium, GaAs, and InGaAs: a challenge in semiconductor processing.Meeting abstract