Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Clima, SergiuSergiuClimaPourtois, GeoffreyGeoffreyPourtoisMenou, NicolasNicolasMenouPopovici, Mihaela IoanaMihaela IoanaPopoviciRothschild, AudeAudeRothschildKaczer, BenBenKaczerVan Elshocht, SvenSvenVan ElshochtWang, Xin PengXin PengWangSwerts, JohanJohanSwertsPierreux, DieterDieterPierreuxDe Gendt, StefanStefanDe GendtWouters, DirkDirkWoutersKittl, JorgeJorgeKittl2021-10-172021-10-1720090167-9317https://imec-publications.be/handle/20.500.12860/15120Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric responseJournal articlehttp://dx.doi.org/10.1016/j.mee.2009.03.029