Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning

Xu, KaidongKaidongXuVos, RitaRitaVosVereecke, GuyGuyVereeckeDoumen, GeertGeertDoumenFyen, WimWimFyenMertens, PaulPaulMertensHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckierFransaer, J.J.FransaerKovacs, F.F.Kovacs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11576Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaningJournal article