Cho, Jeong-HyunJeong-HyunChoKeung, Michael D.Michael D.KeungVerellen, NielsNielsVerellenLagae, LiesbetLiesbetLagaeMoshchalkov, Victor V.Victor V.MoshchalkovVan Dorpe, PolPolVan DorpeGracias, David H.David H.Gracias2021-10-192021-10-1920111613-6810https://imec-publications.be/handle/20.500.12860/18689Journal article