Quantifying the Ru area selective deposition in nanometer confined volumes using RBS

Claessens, NielsNielsClaessensRahnemaihaghighi, NeginNeginRahnemaihaghighiDelabie, AnneliesAnneliesDelabieVandervorst, WilfriedWilfriedVandervorstVantomme, AndreAndreVantommeMeersschaut, JohanJohanMeersschaut2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36577Quantifying the Ru area selective deposition in nanometer confined volumes using RBSMeeting abstract