The IMEC clean : A new concept for particle and metal removal on Si surfaces

Meuris, MarcMarcMeurisMertens, PaulPaulMertensOpdebeeck, AnnAnnOpdebeeckSchmidt, HaraldHaraldSchmidtDepas, MichelMichelDepasVereecke, GuyGuyVereeckeHeyns, MarcMarcHeynsPhilipossian, A.A.Philipossian2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/766The IMEC clean : A new concept for particle and metal removal on Si surfacesJournal article