Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification

Mylvaganam, KausalaKausalaMylvaganamZhang, LiangchiLiangchiZhangEyben, PierrePierreEybenMody, JayJayModyVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-1820090957-4484https://imec-publications.be/handle/20.500.12860/15907Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verificationJournal article