Channel hot-Carrier degradation in short channel devices with high-k/metal gate stacks

Amat, EsteveEsteveAmatKauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveNafría, MontseMontseNafríaAymerich, XavierXavierAymerichGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14896Channel hot-Carrier degradation in short channel devices with high-k/metal gate stacksProceedings paper