Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacks

Truijen, BrechtBrechtTruijenO'Sullivan, BarryBarryO'SullivanAlam, Md Nur KutubulMd Nur KutubulAlamClaes, DieterDieterClaesThesberg, M.M.ThesbergRoussel, PhilippePhilippeRousselVaisman Chasin, AdrianAdrianVaisman ChasinVan den Bosch, GeertGeertVan den BoschKaczer, BenBenKaczerVan Houdt, JanJanVan Houdt2023-06-022023-02-272023-06-0220221541-7026WOS:000922926400168https://imec-publications.be/handle/20.500.12860/41176Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacksProceedings paper10.1109/IRPS48227.2022.9764603978-1-6654-7950-9WOS:000922926400168