Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

De Volder, MichaelMichaelDe VolderPark, S.J.S.J.ParkTawfik, S.H.S.H.TawfikVidaud, D.O.D.O.VidaudHart, A.J.A.J.Hart2021-10-192021-10-1920110960-1317https://imec-publications.be/handle/20.500.12860/18800Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densificationJournal article