Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond

Ritzenthaler, RomainRomainRitzenthalerMertens, HansHansMertensEneman, GeertGeertEnemanSimoen, EddyEddySimoenBury, ErikErikBuryEyben, PierrePierreEybenBufler, FabianFabianBuflerOniki, YusukeYusukeOnikiBriggs, BasoeneBasoeneBriggsChan, BTBTChanHikavyy, AndriyAndriyHikavyyMannaert, GeertGeertMannaertParvais, BertrandBertrandParvaisVaisman Chasin, AdrianAdrianVaisman ChasinMitard, JeromeJeromeMitardDentoni Litta, EugenioEugenioDentoni LittaSamavedam, SriSriSamavedamHoriguchi, NaotoNaotoHoriguchi2022-08-252022-07-092022-08-2520212380-9248WOS:000812325400030https://imec-publications.be/handle/20.500.12860/40089Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and BeyondProceedings paper10.1109/IEDM19574.2021.9720524978-1-6654-2572-8WOS:000812325400030