Brems, StevenStevenBremsHauptmann, MarcMarcHauptmannCamerotto, ElisabethElisabethCamerottoPacco, AntoineAntoinePaccoHalder, SandipSandipHalderZijlstra, AaldertAaldertZijlstraDoumen, GeertGeertDoumenBearda, TwanTwanBeardaMertens, PaulPaulMertens2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15040Impact of acoustical reflections on megasonic cleaning performanceProceedings paper