Ultra high amorphous silicon passivation quality of crystalline silicon surface using in-situ post-deposition treatments

Meddeb, HosnyHosnyMeddebBearda, TwanTwanBeardaDimassi, WissemWissemDimassiAbdulraheem, YaserYaserAbdulraheemEzzaouia, HatemHatemEzzaouiaGordon, IvanIvanGordonSzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmans2021-10-222021-10-2220151862-6254https://imec-publications.be/handle/20.500.12860/25632Ultra high amorphous silicon passivation quality of crystalline silicon surface using in-situ post-deposition treatmentsJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201409494/abstract